Sputtering Source Magnetron
New Products From This Supplier
Rotary magnetron source
DST-FEBV*******
Specifications
Target size: ID125mm, OD152mm; Length 1550mm
Electrode: M8 studs
Cooling Water coupling connector for target: OD19 tower connector x 2pcs (1x in, 1x out)
Motor: 200W Single Phase:220V, AC Motor(Servo Motor optional)
Target cylinder rotary detection: OMRON sensor
Installation Requirements
Cooling water Temp.: 18-22°C
Cooling water Pressure: < 5KG/cm2
Cooling water Flow Rate: >1.5L/min/KW
Water Velocity: faster than 40L/min
Features and Benefits
Sputtering Width: 1200mm
T-S distance: 80-100mm
Brush Design: High-purity carbon brush, resistance less than 0.6 Ω, and more stable;
Concentricity: Easy change of target with special design of the distal end of the cylindrical target, avoid concentricity issue;
Insulation Design: Double Insulation design, less thermal effect and better stability;
Magnetic Uniformity: Multiple tuning points along the length direction of Magnet Bar via washer and gasket adjustment;
Other Models:
Different Size: DST-FEB100XXXX & DST-FEB152XXXX; i.e:
i.DST-FEB100900, DST-FEB*******, DST-FEB*******, DST-FEB*******, DST-FEB*******, DST-FEB*******;
ii.DST-FEB152900, DST-FEB*******, DST-FEB*******, DST-FEB*******, DST-FEB*******, DST-FEB*******; etc.
Different Mount Method:
DST-FEBV100XXXX, DST-FEBV152XXXX series;
DST-CEB100XXXX, DST-CEB152XXXX series;
High Magnet Strength series:
DST-FEBH100XXXX, DST-FEBH152XXXX series;
Our products are doing really well and very competitive. For our team has been working in the field for a really long time, more than 10 years! and all of them are technically know-how in their small areas. Our CEO used to personally perform process set-up and after-sale services, so he is very knowledgeable about cathode structure and specifications. total number of coating machines he been tested and tuned at least over 1000 units. so we can say we are very familiar with the current coating process technologies, and we had accumulated substantial experiences in the area, and thus we are kind of leading the filed in cathode and ion source design.
Our company philosophy is to deliver advanced technology and sincere services that meet the needs and expectations of our customers. We put it as “Leading technology, outstanding services.”
