Sputtering Source Magnetron
New Products From This Supplier
Planar magnetron source
DST- PMEH100500-AS-AU
Specifications
Exterior Dimension: 640mmx290mm
Target Material Size: 100x500x6mm
Electrode: M8 studs
Gas Distribution and Connectors: single section distribution, 1/4 inch male coupling connector x2pcs
Gas distribution adjustable
Water Cooling:
Cathode:16x12PU tube, quick release coupling(screw), 2x in, 2x out;
Anode:12 x 8 PU tube, quick release coupling(screw) , 2x in, 2x out;
Back plate:12 x 8 PU tube, quick release coupling(screw) 1x in, 1x out;
Installation Requirements
Cooling water Temp.: 18-22°C
Cooling water Pressure: < 3KG/cm2
Cooling water Flow Rate: >1.5L/min/KW
Water Velocity: faster than 10L/min
Features and Benefits:
Sputtering Width: 260mm (target material length minus 300~350mm);
TTS: 80-100mm;
Patented Design (Optional): help reduce substrate temperature;
Gas Distribution: Gas pipe included, distribution adjustable;
Magnet Strength and Uniformity: different strength for options, and uniformity adjustable;
Different magnet material for options;
Other Models:
Inner mount and Exterior mount installation method: DST-PMI100xxxx, DST-PMI125xxxx, DST-PME100xxxx, DST-PME125xxxx; i.e. : DST-PMI100500, DST-PMI125750; DST-PME*******; DST-PME*******, DST-PME100750-RF;
High Magnetic Strength: i.e. : DST-PMIH100900, DST-PMEH100500;
High Yield: i.e.: DST-PMEY100500-RF, DST-PMEY*******-DUAL(twin planar cathode);
Our products are doing really well and very competitive. For our team has been working in the field for a really long time, more than 10 years! and all of them are technically know-how in their small areas. Our CEO used to personally perform process set-up and after-sale services, so he is very knowledgeable about cathode structure and specifications. The total number of coating machines he had been tested and tuned at least over 1000 units. so we can say we are very familiar with the current coating process technologies, and we had accumulated substantial experiences in the area, and thus we are kind of leading the filed in cathode and ion source design.
Our company philosophy is“Leading technology, outstanding services.”
